Systems and methods for improved performance in semiconductor processing

ABSTRACT

Exemplary etching methods may include flowing a hydrogen-containing precursor into a semiconductor processing chamber. The methods may include flowing a fluorine-containing precursor into a remote plasma region of the semiconductor processing chamber. The methods may include forming a plasma of the fluorine-containing precursor in the remote plasma region. The methods may include etching a pre-determined amount of a silicon-containing material from a substrate in a processing region of the semiconductor processing chamber. The methods may include measuring a radical density within the remote plasma region during the etching. The methods may also include halting the flow of the hydrogen-containing precursor into the semiconductor processing chamber when the radical density measured over time correlates to a produced amount of etchant to remove the pre-determined amount of the silicon-containing material.

TECHNICAL FIELD

The present technology relates to semiconductor processes and equipment. More specifically, the present technology relates to repeatable performance of plasma etch processing.

BACKGROUND

Integrated circuits are made possible by processes which produce intricately patterned material layers on substrate surfaces. Producing patterned material on a substrate requires controlled methods for removal of exposed material. Chemical etching is used for a variety of purposes including transferring a pattern in photoresist into underlying layers, thinning layers, or thinning lateral dimensions of features already present on the surface. Often it is desirable to have an etch process that etches one material faster than another facilitating, for example, a pattern transfer process. Such an etch process is said to be selective to the first material. As a result of the diversity of materials, circuits, and processes, etch processes have been developed with a selectivity towards a variety of materials.

Etch processes may be termed wet or dry based on the materials used in the process. A wet HF etch preferentially removes silicon oxide over other dielectrics and materials. However, wet processes may have difficulty penetrating some constrained trenches and also may sometimes deform the remaining material. Dry etches produced in local plasmas formed within the substrate processing region can penetrate more constrained trenches and exhibit less deformation of delicate remaining structures. However, local plasmas may damage the substrate through the production of electric arcs as they discharge.

Thus, there is a need for improved systems and methods that can be used to produce high quality devices and structures. These and other needs are addressed by the present technology.

SUMMARY

Exemplary etching methods may include flowing a hydrogen-containing precursor into a semiconductor processing chamber. The methods may include flowing a fluorine-containing precursor into a remote plasma region of the semiconductor processing chamber. The methods may include forming a plasma of the fluorine-containing precursor in the remote plasma region. The methods may include etching a pre-determined amount of a silicon-containing material from a substrate in a processing region of the semiconductor processing chamber. The methods may include measuring a radical density within the remote plasma region during the etching. The methods may also include halting the formation of plasma or flow of the hydrogen-containing precursor into the semiconductor processing chamber when the radical density measured over time correlates to a produced amount of etchant to remove the pre-determined amount of the silicon-containing material.

In some embodiments, the measuring may be of an atomic trace of hydrogen within the remote plasma region of the semiconductor processing chamber. The hydrogen-containing precursor may be or include hydrogen, ammonia, or water. The measuring may be performed with an optical emission spectrometer positioned within a dielectric component at least partially defining the remote plasma region of the semiconductor processing chamber. The measuring may include measuring a peak intensity of radical hydrogen within the remote plasma region of the semiconductor processing chamber. The method may also include, prior to halting the flow of the hydrogen-containing precursor, identifying an increase in the atomic trace within the remote plasma region. The increase may correlate to complete removal of the silicon-containing material. The remote plasma region may be a region defined within the semiconductor processing chamber and separated from the processing region by one or more chamber components. The methods may also include flowing an inert precursor into the remote plasma region and forming a plasma of the inert precursor within the remote plasma region. A stable plasma of the inert precursor may be produced prior to flowing the fluorine-containing precursor into the remote plasma region. The hydrogen-containing precursor may be flowed to bypass the remote plasma region during the etching method.

Some embodiments of the present technology may also encompass chamber cleaning methods. The methods may include forming a plasma of a fluorine-containing precursor in a semiconductor processing chamber in which an etch process utilizing a hydrogen-containing precursor has been performed. The methods may include measuring a radical density of the hydrogen-containing precursor. The methods may include extinguishing the plasma of the fluorine-containing precursor when the radical density of the hydrogen-containing precursor reaches a pre-determined threshold.

In some embodiments, additional hydrogen-containing precursor may not be flowed into the semiconductor processing chamber during the chamber cleaning method. The hydrogen-containing precursor may include hydrogen, ammonia, or anhydrous hydrogen fluoride. The measuring may be of an atomic trace of hydrogen within a remote plasma region of the semiconductor processing chamber. The methods may include subsequently repeating the etch process utilizing the hydrogen-containing precursor. The etch process as repeated may produce a resultant etch within 5% of the etch process initially performed.

Some embodiments of the present technology may also encompass etching methods. The methods may include flowing a hydrogen-containing precursor into a semiconductor processing chamber. The methods may include flowing a fluorine-containing precursor into a remote plasma region of the semiconductor processing chamber. The methods may include forming a plasma of the fluorine-containing precursor in the remote plasma region. The methods may include etching in a first etch process a pre-determined amount of a silicon-containing material from a substrate in a processing region of the semiconductor processing chamber. The methods may include measuring a radical density within the remote plasma region during the etching. The methods may include halting the flow of the hydrogen-containing precursor into the semiconductor processing chamber when the radical density measured over time correlates to a produced amount of etchant to remove the pre-determined amount of the silicon-containing material.

The methods may include removing the substrate from the semiconductor processing chamber. The methods may include forming a plasma of a fluorine-containing precursor in the semiconductor processing chamber. The methods may include measuring a radical density of the hydrogen-containing precursor. The methods may include extinguishing the plasma of the fluorine-containing precursor when the radical density of the hydrogen-containing precursor reaches a pre-determined threshold. The methods may also include performing a second etch process. In some embodiments the first etch process and the second etch process may be different etch processes. The first etch process may include a first etch for a dual damascene etch process, and the second etch process may include a second etch for a dual damascene etch process.

Such technology may provide numerous benefits over conventional systems and techniques. For example, the processes may provide precise control on etch processes based on specific amounts of etchant materials formed. Additionally, the processes may allow repeatable etching to be performed due to consistent chamber cleans based on end points associated with specific chamber conditions and not arbitrary time considerations. These and other embodiments, along with many of their advantages and features, are described in more detail in conjunction with the below description and attached figures.

BRIEF DESCRIPTION OF THE DRAWINGS

A further understanding of the nature and advantages of the disclosed technology may be realized by reference to the remaining portions of the specification and the drawings.

FIG. 1 shows a top plan view of one embodiment of an exemplary processing system according to some embodiments of the present technology.

FIG. 2A shows a schematic cross-sectional view of an exemplary processing chamber according to some embodiments of the present technology.

FIG. 2B shows a detailed view of a portion of the processing chamber illustrated in

FIG. 2A according to some embodiments of the present technology.

FIG. 3 shows a bottom plan view of an exemplary showerhead according to some embodiments of the present technology.

FIG. 4 shows exemplary operations in a method according to some embodiments of the present technology.

FIG. 5 shows exemplary operations in a method according to some embodiments of the present technology.

FIG. 6 shows a graph of peak intensity of various precursors during processes according to some embodiments of the present technology.

FIG. 7 shows a graph of peak intensity of an atomic hydrogen trace according to some embodiments of the present technology.

FIG. 8 shows a graph correlating etch rate with radical density over a period of time according to some embodiments of the present technology.

FIGS. 9A-9C show cross-sectional views of substrates being processed according to some embodiments of the present technology.

FIG. 10 shows an exemplary etching operation transitioning between two materials according to some embodiments of the present technology.

Several of the figures are included as schematics. It is to be understood that the figures are for illustrative purposes, and are not to be considered of scale unless specifically stated to be of scale. Additionally, as schematics, the figures are provided to aid comprehension and may not include all aspects or information compared to realistic representations, and may include additional or exaggerated material for illustrative purposes.

In the appended figures, similar components and/or features may have the same reference label. Further, various components of the same type may be distinguished by following the reference label by a letter that distinguishes among the similar components. If only the first reference label is used in the specification, the description is applicable to any one of the similar components having the same first reference label irrespective of the letter.

DETAILED DESCRIPTION

As devices produced in semiconductor processing continue to shrink, uniformity, process control, and repeatability are becoming more challenging from process to process. For example, a chamber may be used to perform an etch process on multiple wafers, and the process parameters may seek an amount of uniformity between each process performed, such as a consistent etch amount. Additionally, chambers may be used to perform multiple etches in sequence, such as performing a first etch process on a substrate, followed by a second etch process on the same substrate. Control over the amount being etched can be difficult when the processes etch different amounts from one another.

For example, when plasma etch processing is performed, precursor byproducts as well as etchant materials may be absorbed into chamber components and maintained within a chamber subsequent a process. For example, radical hydrogen may be produced in an etch process, and effluents may be absorbed within chamber components, which may affect the amount of material etched, as well as uniformity of etching process to process. The amount of this radical hydrogen and other radicals or materials may not be consistent process to process, and thus maintaining a uniform chamber environment may be difficult.

In an attempt to produce a baseline environment within the chamber before each etch process, chamber seasoning may be performed before an initial process, and a chamber clean may be performed subsequent each process. Conventional technologies have performed chamber cleans for a period of time, and often assumed that the chamber was generally similar to a baseline. However, depending on the processes performed, chamber cleans for a specific amount of time often do not produce a consistent chamber environment for subsequent etches, especially when etch processes performed change from one to the next as will be described with examples below. The present technology overcomes many of these issues by monitoring radical density or an atomic trace during processing as well as during cleaning to provide consistent etching as well as a consistent end point in cleaning regardless of the process performed.

Although the remaining disclosure will routinely identify specific etching processes utilizing the disclosed technology, it will be readily understood that the systems and methods are equally applicable to deposition and cleaning processes as may occur in the described chambers, as well as other etching technology that may be performed with a variety of exposed materials that may be maintained or substantially maintained. Accordingly, the technology should not be considered to be so limited as for use with the exemplary etching processes or chambers alone.

Moreover, although an exemplary chamber is described to provide foundation for the present technology, it is to be understood that the present technology can be applied to virtually any semiconductor processing chamber that may allow the operations described.

FIG. 1 shows a top plan view of one embodiment of a processing system 100 of deposition, etching, baking, and curing chambers according to embodiments. In the figure, a pair of front opening unified pods (FOUPs) 102 supply substrates of a variety of sizes that are received by robotic arms 104 and placed into a low pressure holding area 106 before being placed into one of the substrate processing chambers 108 a-f, positioned in tandem sections 109 a-c. A second robotic arm 110 may be used to transport the substrate wafers from the holding area 106 to the substrate processing chambers 108 a-f and back. Each substrate processing chamber 108 a-f, can be outfitted to perform a number of substrate processing operations including the dry etch processes described herein in addition to cyclical layer deposition (CLD), atomic layer deposition (ALD), chemical vapor deposition (CVD), physical vapor deposition (PVD), etch, pre-clean, degas, orientation, and other substrate processes.

The substrate processing chambers 108 a-f may include one or more system components for depositing, annealing, curing and/or etching a dielectric film on the substrate wafer. In one configuration, two pairs of the processing chambers, e.g., 108 c-d and 108 e-f, may be used to deposit dielectric material on the substrate, and the third pair of processing chambers, e.g., 108 a-b, may be used to etch the deposited dielectric. In another configuration, all three pairs of chambers, e.g., 108 a-f, may be configured to etch a dielectric film on the substrate. Any one or more of the processes described may be carried out in chamber(s) separated from the fabrication system shown in different embodiments. It will be appreciated that additional configurations of deposition, etching, annealing, and curing chambers for dielectric films are contemplated by system 100.

FIG. 2A shows a cross-sectional view of an exemplary process chamber system 200 with partitioned plasma generation regions within the processing chamber. During film etching, e.g., titanium nitride, tantalum nitride, tungsten, silicon, polysilicon, silicon oxide, silicon nitride, silicon oxynitride, silicon oxycarbide, etc., a process gas may be flowed into the first plasma region 215 through a gas inlet assembly 205. A remote plasma system (RPS) 201 may optionally be included in the system, and may process a first gas which then travels through gas inlet assembly 205. The inlet assembly 205 may include two or more distinct gas supply channels where the second channel (not shown) may bypass the RPS 201, if included.

A cooling plate 203, faceplate 217, ion suppressor 223, showerhead 225, and a substrate support 265, having a substrate 255 disposed thereon, are shown and may each be included according to embodiments. The pedestal 265 may have a heat exchange channel through which a heat exchange fluid flows to control the temperature of the substrate, which may be operated to heat and/or cool the substrate or wafer during processing operations. The wafer support platter of the pedestal 265, which may comprise aluminum, ceramic, or a combination thereof, may also be resistively heated in order to achieve relatively high temperatures, such as from up to or about 100° C. to above or about 1100° C., using an embedded resistive heater element.

The faceplate 217 may be pyramidal, conical, or of another similar structure with a narrow top portion expanding to a wide bottom portion. The faceplate 217 may additionally be flat as shown and include a plurality of through-channels used to distribute process gases. Plasma generating gases and/or plasma excited species, depending on use of the RPS 201, may pass through a plurality of holes, shown in FIG. 2B, in faceplate 217 for a more uniform delivery into the first plasma region 215.

Exemplary configurations may include having the gas inlet assembly 205 open into a gas supply region 258 partitioned from the first plasma region 215 by faceplate 217 so that the gases/species flow through the holes in the faceplate 217 into the first plasma region 215.

Structural and operational features may be selected to prevent significant backflow of plasma from the first plasma region 215 back into the supply region 258, gas inlet assembly 205, and fluid supply system 210. The faceplate 217, or a conductive top portion of the chamber, and showerhead 225 are shown with an insulating ring 220 located between the features, which allows an AC potential to be applied to the faceplate 217 relative to showerhead 225 and/or ion suppressor 223. The insulating ring 220 may be positioned between the faceplate 217 and the showerhead 225 and/or ion suppressor 223 enabling a capacitively coupled plasma (CCP) to be formed in the first plasma region. A baffle (not shown) may additionally be located in the first plasma region 215, or otherwise coupled with gas inlet assembly 205, to affect the flow of fluid into the region through gas inlet assembly 205.

In some embodiments, insulating ring 220 may be a ceramic or other dielectric material, and may include a port through which a sensor 222 may be positioned. Insulating ring 220 may define a height of the remote plasma region, or otherwise contribute to defining the region. Sensor 222 may be part of an optical emission spectrometer that may be used to measure radical density within plasma region 215 as will be explained in detail further below.

The ion suppressor 223 may comprise a plate or other geometry that defines a plurality of apertures throughout the structure that are configured to suppress the migration of ionically-charged species out of the first plasma region 215 while allowing uncharged neutral or radical species to pass through the ion suppressor 223 into an activated gas delivery region between the suppressor and the showerhead. In embodiments, the ion suppressor 223 may comprise a perforated plate with a variety of aperture configurations. These uncharged species may include highly reactive species that are transported with less reactive carrier gas through the apertures. As noted above, the migration of ionic species through the holes may be reduced, and in some instances completely suppressed. Controlling the amount of ionic species passing through the ion suppressor 223 may advantageously provide increased control over the gas mixture brought into contact with the underlying wafer substrate, which in turn may increase control of the deposition and/or etch characteristics of the gas mixture. For example, adjustments in the ion concentration of the gas mixture can significantly alter its etch selectivity, e.g., SiNx:SiOx etch ratios, Si:SiOx etch ratios, etc. In alternative embodiments in which deposition is performed, it can also shift the balance of conformal-to-flowable style depositions for dielectric materials.

The plurality of apertures in the ion suppressor 223 may be configured to control the passage of the activated gas, i.e., the ionic, radical, and/or neutral species, through the ion suppressor 223. For example, the aspect ratio of the holes, or the hole diameter to length, and/or the geometry of the holes may be controlled so that the flow of ionically-charged species in the activated gas passing through the ion suppressor 223 is reduced. The holes in the ion suppressor 223 may include a tapered portion that faces the plasma excitation region 215, and a cylindrical portion that faces the showerhead 225. The cylindrical portion may be shaped and dimensioned to control the flow of ionic species passing to the showerhead 225. An adjustable electrical bias may also be applied to the ion suppressor 223 as an additional means to control the flow of ionic species through the suppressor.

The ion suppressor 223 may function to reduce or eliminate the amount of ionically charged species traveling from the plasma generation region to the substrate. Uncharged neutral and radical species may still pass through the openings in the ion suppressor to react with the substrate. It should be noted that the complete elimination of ionically charged species in the reaction region surrounding the substrate may not be performed in embodiments. In certain instances, ionic species are intended to reach the substrate in order to perform the etch and/or deposition process. In these instances, the ion suppressor may help to control the concentration of ionic species in the reaction region at a level that assists the process.

Showerhead 225 in combination with ion suppressor 223 may allow a plasma present in first plasma region 215 to avoid directly exciting gases in substrate processing region 233, while still allowing excited species to travel from chamber plasma region 215 into substrate processing region 233. In this way, the chamber may be configured to prevent the plasma from contacting a substrate 255 being etched. This may advantageously protect a variety of intricate structures and films patterned on the substrate, which may be damaged, dislocated, or otherwise warped if directly contacted by a generated plasma. Additionally, when plasma is allowed to contact the substrate or approach the substrate level, the rate at which oxide species etch may increase. Accordingly, if an exposed region of material is oxide, this material may be further protected by maintaining the plasma remotely from the substrate.

The processing system may further include a power supply 240 electrically coupled with the processing chamber to provide electric power to the faceplate 217, ion suppressor 223, showerhead 225, and/or pedestal 265 to generate a plasma in the first plasma region 215 or processing region 233. The power supply may be configured to deliver an adjustable amount of power to the chamber depending on the process performed. Such a configuration may allow for a tunable plasma to be used in the processes being performed. Unlike a remote plasma unit, which is often presented with on or off functionality, a tunable plasma may be configured to deliver a specific amount of power to the plasma region 215. This in turn may allow development of particular plasma characteristics such that precursors may be dissociated in specific ways to enhance the etching profiles produced by these precursors.

A plasma may be ignited either in chamber plasma region 215 above showerhead 225 or substrate processing region 233 below showerhead 225. Plasma may be present in chamber plasma region 215 to produce the radical precursors from an inflow of, for example, a fluorine-containing precursor or other precursor. An AC voltage typically in the radio frequency (RF) range may be applied between the conductive top portion of the processing chamber, such as faceplate 217, and showerhead 225 and/or ion suppressor 223 to ignite a plasma in chamber plasma region 215 during deposition. An RF power supply may generate a high RF frequency of 13.56 MHz but may also generate other frequencies alone or in combination with the 13.56 MHz frequency.

FIG. 2B shows a detailed view 253 of the features affecting the processing gas distribution through faceplate 217. As shown in FIGS. 2A and 2B, faceplate 217, cooling plate 203, and gas inlet assembly 205 intersect to define a gas supply region 258 into which process gases may be delivered from gas inlet 205. The gases may fill the gas supply region 258 and flow to first plasma region 215 through apertures 259 in faceplate 217. The apertures 259 may be configured to direct flow in a substantially unidirectional manner such that process gases may flow into processing region 233, but may be partially or fully prevented from backflow into the gas supply region 258 after traversing the faceplate 217.

The gas distribution assemblies such as showerhead 225 for use in the processing chamber section 200 may be referred to as dual channel showerheads (DCSH) and are additionally detailed in the embodiments described in FIG. 3. The dual channel showerhead may provide for etching processes that allow for separation of etchants outside of the processing region 233 to provide limited interaction with chamber components and each other prior to being delivered into the processing region.

The showerhead 225 may comprise an upper plate 214 and a lower plate 216. The plates may be coupled with one another to define a volume 218 between the plates. The coupling of the plates may be so as to provide first fluid channels 219 through the upper and lower plates, and second fluid channels 221 through the lower plate 216. The formed channels may be configured to provide fluid access from the volume 218 through the lower plate 216 via second fluid channels 221 alone, and the first fluid channels 219 may be fluidly isolated from the volume 218 between the plates and the second fluid channels 221. The volume 218 may be fluidly accessible through a side of the gas distribution assembly 225.

FIG. 3 is a bottom view of a showerhead 325 for use with a processing chamber according to embodiments. Showerhead 325 may correspond with the showerhead 225 shown in FIG. 2A. Through-holes 365, which show a view of first fluid channels 219, may have a plurality of shapes and configurations in order to control and affect the flow of precursors through the showerhead 225. Small holes 375, which show a view of second fluid channels 221, may be distributed substantially evenly over the surface of the showerhead, even amongst the through-holes 365, and may help to provide more even mixing of the precursors as they exit the showerhead than other configurations.

The chamber discussed previously may be used in performing exemplary methods including etching methods. Turning to FIG. 4 is shown exemplary operations in a method 400 according to some embodiments of the present technology. Method 400 may relate to an etching method for a silicon-containing material, and it is to be understood that the method may include one or more operations prior to the initiation of the method. These operations may include front end processing, deposition, gate formation, etching, polishing, cleaning, or any other operations that may be performed prior to the described operations. The method may include a number of optional operations, which may or may not be specifically associated with some embodiments of methods according to the present technology. For example, many of the operations are described in order to provide a broader scope of the structural formation, but are not critical to the technology, or may be performed by alternative methodology as will be discussed further below.

Method 400 may or may not involve optional operations to develop the semiconductor structure to a particular fabrication operation. It is to be understood that method 400 may be performed on any number of semiconductor structures, and examples provided are not intended to limit the scope of the technology. Other exemplary structures may include two-dimensional and three-dimensional structures common in semiconductor manufacturing, and within which a silicon-containing material is to be removed relative to one or more other materials, as the present technology may selectively remove silicon-containing materials, such as polysilicon, silicon oxide, silicon nitride, silicon carbide, or other silicon-containing materials.

Method 400 may be based on a plasma etch process in which plasma effluents are utilized to remove silicon-containing materials. In plasma processing, determining when the etch process has been completed may be difficult when remote plasma is utilized. For example, in chamber 200 described above, plasma effluents may be formed in remote plasma region 215. Sensor 222 may be used with an optical emission spectrometer (“OES”), which may allow measurements of constituent materials generated in the plasma region. However, the etch process itself may occur in region 233, which may not be visible to measurement equipment in some embodiments. Additionally, due to characteristics such as a positive pressure environment, for example, etch byproducts may be drawn from the system, and thus may also not be visible by sensor 222 or other equipment. The present methodology may utilize measurements within the remote plasma region to determine an amount of etching that may be performed.

Method 400 may include flowing a hydrogen-containing precursor into a processing chamber at operation 405, and may include flowing a fluorine-containing precursor into the processing chamber at operation 410. The precursors may be flowed in any order, or may be co-flowed into the chamber. These materials may be utilized in a plasma process, where a plasma is formed from the fluorine-containing precursor in operation 415. The plasma effluents may be used to produce an etchant including both hydrogen and fluorine, and which may be formed or flowed into a processing region in which a substrate is housed. The etchant may be used to etch silicon-containing materials that reside on the substrate as noted above in operation 420. Sensor 222 may be used to measure radical density in the remote plasma region during the etching at operation 425, or may be used to measure one or more atomic traces within the chamber. Once a pre-determined amount of silicon-containing material has been etched, the flow of the hydrogen-containing precursor may be halted at operation 430, or the process may otherwise be halted, such as by extinguishing the plasma, for example. By measuring certain radical densities, control of the etch process and a determination of an amount of etchant produced may be afforded.

One exemplary etch process may utilize nitrogen trifluoride and hydrogen as the two precursors, although these precursors are intended to be examples only, and any other fluorine or hydrogen-containing precursors may also be used as will be described below. One or both of the precursors may be flowed into a remote plasma region of a semiconductor processing chamber. For example, both precursors may be flowed into the remote plasma region, or only the fluorine-containing precursor may be flowed into the remote plasma region, while the hydrogen-containing precursor is flowed to bypass the remote plasma region, such as through showerhead 225, to interact with the plasma effluents in the processing region as described above.

The fluorine-containing precursor may be used to produce fluorine-containing radical effluents in region 215, which may then flow through the chamber components to interact with the hydrogen-containing precursor in the processing region to produce an etchant for removing silicon-containing materials. The reaction mechanism producing the hydrogen-and-fluorine containing etchant may also produce additional hydrogen radical that is not consumed in formation of the etchant. For example, with hydrogen gas or other hydrogen-containing precursors, when fluorine radicals interact with the precursor, the resultant products may be a molecule of hydrogen fluoride, and a residual radical hydrogen atom. Despite the positive pressure within the chamber environment, or the component profiles within the chamber, radical hydrogen may freely backflow from the processing region into the remote plasma region 215, where it may be measured by sensor 222 for the OES. In some optional embodiments, in formation of a stable plasma prior to delivery of the fluorine-containing precursor, an inert precursor, such as helium for example, may be used to strike a plasma in the remote region 215. Once a stable plasma has been formed with the inert precursor, delivery of the fluorine-containing precursor may commence.

Regardless of the order of precursor delivery, once the fluorine-containing precursor is delivered, the formation of hydrogen fluoride may produce an amount of radical hydrogen, which may be visible to the OES, such as with the atomic trace of hydrogen. The amount of radical hydrogen produced may be used in a correlation to determine an amount of etchant produced, and which may be further used to determine an amount of silicon-containing material that will be removed. Testing has confirmed the consistency of this correlation, especially when chamber cleaning according to some embodiments is performed, allowing a radical density of the hydrogen to be used to estimate an amount in volume or depth of silicon-containing material that will be removed.

Skipping to FIG. 6 is shown a graph of peak intensity of various precursors during processes according to some embodiments of the present technology. In the upper chart, the radical intensity of various precursors is shown during etch process 400. As illustrated, peaks 605 and 610 correlate to hydrogen radicals residing in the remote plasma region. Peak 615 illustrates fluorine concentration, and is minimally visible. When precursors such as nitrogen trifluoride are delivered into the remote plasma region, formed fluorine radicals will almost immediately combine with radical hydrogen to produce hydrogen fluoride, and thus the fluorine itself may be less visible to the OES as illustrated. Accordingly, although fluorine is a component of the etchant used to etch the silicon-containing material, the monitoring may be performed on the hydrogen radical of the hydrogen-containing precursor in method 400, and/or on HF or other hydrogen-containing materials in alternative methods. By measuring peak intensity of the hydrogen-containing precursor or hydrogen radical, the etch may be controlled by correlating the amount of etchant produced as well as the etch rate. As radical density as identified by peak intensity of a particular atomic trace is increased, etchant amount may be increased, and additional etching may occur and/or increased etch rate may occur. As radical density decreases, etchant amount may decrease and/or etch rate may reduce. This will be described further in a detailed example including both an etch process according to some embodiments of the present technology as well as a cleaning process according to some embodiments of the present technology.

Precursors used in the method may be selected based on the silicon-containing material to be etched, but may generally include a fluorine-containing precursor or a halogen-containing precursor. An exemplary fluorine-containing precursor may be nitrogen trifluoride (NF3), which may be flowed into the remote plasma region, which may be separate from, but fluidly coupled with, the processing region. Other sources of fluorine may be used in conjunction with or as replacements for the nitrogen trifluoride. In general, a fluorine-containing precursor may be flowed into the remote plasma region and the fluorine-containing precursor may include at least one precursor selected from the group of atomic fluorine, diatomic fluorine, nitrogen trifluoride, carbon tetrafluoride, hydrogen fluoride including anhydrous hydrogen fluoride, xenon difluoride, and various other fluorine-containing precursors used or useful in semiconductor processing. The precursors may also include any number of carrier gases, which may include nitrogen, helium, argon, or other noble, inert, or useful precursors.

The hydrogen-containing precursor may include hydrogen, a hydrocarbon, water vapor, an alcohol, such as isopropyl alcohol, hydrogen peroxide, or other materials that may include hydrogen as would be understood by the skilled artisan. Additional precursors such as carrier gases or inert materials may be included with the hydrogen-containing precursors as well. In some embodiments, the hydrogen-containing precursor, such as hydrogen gas or ammonia, may be maintained fluidly isolated from a plasma that may be formed within the remote plasma region. In embodiments, the plasma processing region may be maintained plasma free during the removal operations. By plasma free is meant that plasma may not be actively formed within the processing region during the operations, although plasma effluents produced remotely as described earlier, may be used during the operations.

Turning to FIG. 5 is shown exemplary operations in a cleaning method 500 according to some embodiments of the present technology. Cleaning method 500 may be performed after any number of plasma processes including etching, deposition, or other processes which may produce residual materials within the chamber. For example, despite purging, radical materials produced during a method, such as etching method 400 among any other method, as well as initial precursors may remain within the chamber. These radical materials may affect subsequent processes performed. For example, residual hydrogen radicals may afford increased etchant in a subsequent etch process, which may result in increased etch over a previous etch. By utilizing a similar OES measurement as in method 400, control over subsequent etch processes may be improved by ensuring a relatively consistent chamber environment process to process.

Because hydrogen radical may be absorbed within chamber components, the amount of hydrogen radical maintained within the chamber may not reach zero, but may plateau over time as it is removed from the system and/or desorbed from chamber surfaces. Some conventional processes perform cleaning operations for a set amount of time, regardless of the process performed, in an attempt to create a consistent chamber environment. However, because the amount of hydrogen that may be removed from the system may not be consistent, once the next etch process is performed, too much residual hydrogen may remain, or the absorption process similar to seasoning may occur, which may affect the amount of etching as well as the uniformity of etching in subsequent processes. Cleaning methods according to the present technology may resolve these issues by performing a dynamic clean that seeks to produce a pre-determined level of hydrogen radical, as opposed to perform a clean for a pre-determined amount of time.

Method 500 may optionally include removing a substrate on which an etch was performed in operation 505, such as etch method 400, although in some embodiments the substrate may be maintained within the chamber. At operation 510, a fluorine-containing precursor may be flowed into a processing chamber, such as into a similar or different remote plasma region or elsewhere, and a plasma may be formed of the fluorine-containing precursor. The produced fluorine plasma effluents may then perform the same or similar operations as in method 400 with respect to the interaction with the hydrogen, but may scavenge residual hydrogen material within the processing chamber. In some embodiments, method 500 may not include any additional flow of the hydrogen-containing precursor used in an etch process performed in the processing chamber, and in some embodiments method 500 may not include any hydrogen-containing precursors.

By not flowing any additional hydrogen-containing precursor, the produced fluorine radicals may combine with any residual hydrogen-containing precursor and be purged from the chamber. Similar to method 400, method 500 may include measuring radical density at operation 515, such as with an optical emission spectrometer or OES described previously that may measure an atomic trace intensity. Although the radical density may be measured anywhere in the chamber, if already incorporated within the remote plasma region, the measurement for method 500 may also be performed in this region, even if the fluorine-containing radical is produced elsewhere, such as upstream in an RPS unit. The OES may be used to measure constituent materials in the environment to determine removal of the hydrogen materials. Once the hydrogen material has been sufficiently removed, the amount of fluorine radical may begin to increase within the system.

As noted above, hydrogen may not be completely removed as it may be absorbed within chamber components. Although this material may begin to be desorbed from the chamber, the amount of fluorine may build up in the system, while the amount of hydrogen continues to reduce. This may be monitored with the OES, and once a particular radical density has been achieved, such as when the radical density of the hydrogen-containing precursor reaches a pre-determined threshold as identified by a reduction in atomic trace intensity, or as a measure of relative depletion or a percentage drop, flow of the fluorine-containing precursor may be halted, or the plasma of the fluorine-containing precursor may be extinguished at operation 520. Method 500 may include any of the precursors and/or carrier gases previously described, and may be used subsequent any number of process operations to produce a substantially consistent chamber environment. In some embodiments, a subsequent etch process may be performed at optional operation 525. The subsequent etch process may be the previous etch process repeated on a subsequent substrate, or a subsequent etch may be performed on the same substrate as will be described below. Embodiments of the present technology may allow improved reproduction of etch and other plasma processes, and in some embodiments, embodiments of the present technology may allow repeated etch processes to be performed within 10% margin of error of the results of a previous etch process, and in some embodiments within 9% margin of error, within 8% margin of error, within 7% margin of error, within 6% margin of error, within 5% margin of error, within 4% margin of error, within 3% margin of error, within 2% margin of error, or may produce substantially or essentially similar results for repeated etch processes.

Returning to FIG. 6, the bottom chart may illustrate performance of the cleaning method 500 utilizing the same components within a processing chamber as utilized in method 400, such as an OES positioned to measure radical density within the remote plasma region. As illustrated, as the cleaning method is performed, the hydrogen peaks are reduced as illustrated by peaks 620 and 625, which correspond to peaks 605 and 610 produced during the etch process.

As the cleaning method is continued, while the hydrogen peaks begin to plateau near a minimum, fluorine concentration may increase, and may become more apparent as illustrated by peak 630, which corresponds to the fluorine peak 615 produced during the etch process. As will be explained with an example below, the cleaning method may be performed to produce a residual hydrogen amount that may allow a consistent chamber environment for subsequent processes.

The previous figures have illustrated how peak intensity of OES measurements may be used to monitor a process being performed. By isolating and monitoring particular peaks over time, the present technology may afford correlations and processes that produce consistent and controlled etching and cleaning processes. FIG. 7 shows a representative graph of peak intensity of hydrogen according to some embodiments of the present technology. The figure may illustrate when a process is performed, which may include a combined etching and cleaning operation. In some embodiments method 400 and method 500 may be combined to produce an etching method that may include a subsequent cleaning. The cleaning may refresh the chamber for a subsequent process, such as a secondary etch process, which may be the same or different from the first etch process in embodiments.

The chart in FIG. 7 shows a single process being performed according to some embodiments of the present technology, but it is to be understood that the figure is only included to further explain the technology, which may be performed with regard to measurement of other materials by the OES, and may be used in almost any plasma-processing to monitor the process for control on the initial process being performed, as well as control on the cleaning process to produce a consistent environment.

The graph illustrates a single peak for hydrogen atomic trace intensity in a remote plasma region of a semiconductor processing chamber. At the left of the chart, the peak intensity is low as the process has not yet begun, although hydrogen may be flowing into the chamber. As explained above, the hydrogen-containing precursor may bypass the remote plasma region. Additionally, because the OES may be measuring atomic trace intensity, no or minimal hydrogen radical may be present. At position 705, a plasma may be ignited as previously described. In some embodiments the plasma may be ignited from a fluorine-containing precursor, although in other embodiments the plasma may be formed from an inert precursor, such as helium, for example. By initially forming the plasma from an inert precursor, improved estimates of produced etchant may be afforded.

With the hydrogen-containing and inert precursors flowing, and a plasma formed in the remote plasma region, hydrogen radical concentration measured as intensity of the atomic H trace may increase beginning at position 705 within the remote plasma region as the plasma is formed and stabilizes. At position 710, the fluorine-containing precursor may be flowed into the remote plasma region, and fluorine radicals may be produced. As explained previously, fluorine radicals may produce a hydrogen-and-fluorine-containing etchant, as well as additional hydrogen radical, and thus beginning at position 710, the hydrogen peak intensity may rise considerably based on the generation of additional hydrogen radical. Based on the flow rates of the precursors, the process may produce a consistent amount of etchant, and hence consistent amount of additional hydrogen radical, as illustrated by the maintained peak intensity of hydrogen during the etch process. At position 715, the etch process may be completed by halting the flow of the hydrogen-containing precursor and/or stopping the plasma process. The substrate may or may not be removed from the processing chamber before a cleaning process is performed.

As previously explained, an inert precursor may be used to strike and stabilize the plasma, as illustrated by the jagged curve produced between 705 and 710. From 710 to 715, the fluorine-containing precursor is also flowed into the chamber and plasma, and etchant is produced. As previously explained, a correlation based on the reaction chemistry may allow measurement of an amount of hydrogen radical or reactive etchants produced to be used to determine, such as via calculation, an amount of etchant produced. To determine an amount of hydrogen radical produced, the area under the peak intensity of hydrogen radical may be integrated between position 710 and 715. This may allow a determination of the amount of hydrogen radical produced, which may allow an amount of etchant produced to be calculated.

Depending on the material to be etched, and the reaction chemistry of the etch, by knowing the amount of etchant produced, the amount of material removed can also be calculated. This can provide improved control on etch processes. For example, in a process in which a particular amount of material is to be removed, the calculations may be reversed to determine how much hydrogen radical would be produced. The process may then be performed, and when the integrated area correlates to the calculated amount of hydrogen radical, the process can be halted with confidence that the desired amount of etch has been performed. Correction factors may be included with any of these calculations to account for materials adsorbed to chamber components, or otherwise lost during the process.

In other processes, the etch may be performed until complete removal of a material occurs, such as removal to an etch stop material. In these cases, the integration may not be necessary. Once the removal has been completed, no further etching may occur, and etchant may begin to build in the system, along with an increase in hydrogen radical, and the peak intensity of hydrogen radical may begin to drift upward as will be noted below. This may be used as an indication that the process has been completed, and the process may be halted.

After the process has been stopped at position 715, the substrate may be removed from the chamber to perform a cleaning process, or the substrate may remain in the processing chamber in other embodiments. Although flow of the hydrogen-containing precursor may have been ceased, some hydrogen-containing precursor may remain within the processing chamber, as previously described. Depending on the etch performed, the amount of residual hydrogen may be variable. At position 720, the fluorine-containing precursor may be reintroduced into the processing chamber, and a plasma may be formed to produce radical fluorine-containing materials. Residual hydrogen-containing precursor may be dissociated producing additional hydrogen radicals as illustrated. No additional hydrogen-containing precursor may be flowed into the processing chamber, while the fluorine-containing precursor is flowed, and thus as radical fluorine is produced, the produced hydrogen radicals may be consumed and purged from the system, and the amount of hydrogen radical may steadily decrease as illustrated.

Because of the amount of adsorption, the amount of hydrogen may not reach zero, which may be acceptable to allow a subsequent process to not lose substantial precursors to re-adsorption. Once the hydrogen radical density, as indicated by peak intensity, has reached a predetermined amount to be produced for each cleaning process, the plasma may be extinguished at position 725, and/or the flow of the fluorine-containing precursor may be halted. As an alternative, the process may monitor a percentage drop in the H signal, or removal amount. At a predetermined level of drop or when the signal drop may be less than or about 1%, about 2%, about 5%, or some other delta between multiple consecutive data points, the operation may be terminated. A second etch process may then be performed on the previous substrate or on a subsequent substrate on which the etch process is to be performed. The amount of cleaning performed may also affect the curve of hydrogen radical produced, which may indicate the amount of etchant produced. For example, when a shorter cleaning process is performed, indicative of more residual hydrogen, a higher etch rate may be performed in subsequent processes, as the curve rises in intensity, indicative of increased hydrogen radical density and produced etchant. As the cleaning process is performed to a lower residual hydrogen density, subsequent processes may initially produce less hydrogen radical and etchant, thereby providing lower etch rates. This may afford further control on etch processes performed where greater amounts of material are to be removed, or where fine control of removal is desired.

As previously discussed, the residual amount of hydrogen radical may be based on the etch process performed. For example, if additional material was to be removed, the process may be performed for a longer period of time, which may produce a longer area under the curve, or increased integrated area. FIG. 8 shows a graph showing the correlation between etch amount and the integrated area of the hydrogen signal according to some embodiments of the present technology. While flow rates may be used to tune the intensity of the peaks and the etch rate, the time at which the peak is formed may correlate to the etch amount. As shown in the chart, as the integrated area under the curve increases, etch amount increases substantially linearly. Accordingly, the calculations discussed before can be used to produce repeatable results where time and peak intensity can be used to precisely control etch processes. By performing cleaning operations to maintain a consistent chamber environment, these processes can be repeated substrate to substrate.

In addition to repeatability of similar processes, some embodiments of the present technology may be used to produce controlled multi-part etches. FIGS. 9A-9C show cross-sectional views of substrate 900 being processed according to some embodiments of the present technology. It is to be understood that the example is intended only to illustrate one application of the present technology, which may be used for any number of other processes including dummy gate removal, fin trimming, cap removal, and many other processes.

As illustrated in FIG. 9A, substrate 900 may include a base 905, which may be a wafer or substrate on which additional layers may be formed, and which may be any intermediate layer in a semiconductor structure through which connections may be made. Interlayer dielectric layers 915 and 920 may be formed over substrate 900, with etch stop layer 910 formed to protect substrate 905 from over etch. Although shown as two layers, layers 915 and 920 may be a single layer of material by utilizing embodiments of the present technology, although in other embodiments an additional etch stop layer may be formed between these two layers as well. Etch processes utilizing precursors as previously described may be used, such as discussed with regard to method 400.

FIG. 9B illustrates a first etch that may be facilitated by photoresist formed above the layers. The etch may be performed down to the etch stop layer 910. Utilizing some embodiments of the present technology, the process may be performed until the hydrogen radical peak intensity drifts as the process reaches the etch stop barrier, indicating the process has completed. A chamber clean, such as utilizing method 500, may be performed to refresh the chamber, and then a second etch process may be performed to etch layer 920 to produce the damascene structure as illustrated in FIG. 9C. Subsequent punch through and metallization may be performed as would be understood.

In the second etch performed, a controlled removal to a particular height may be desired, and may be based on a known thickness of layer 920, or a known removal thickness required. In this scenario, an amount of etchant to produce this amount of removal may be calculated, and an amount of hydrogen radical produced may be further calculated. The process may be performed while integrating the area under the hydrogen peak intensity curve, and once the area correlates to the calculated hydrogen radical density produced and related to the desired etchant, the process may be halted. This may afford a specifically controlled etch to a desired height without the need for additional etch stop layers in some embodiments. A subsequent clean process may be performed, and the next substrate may be processed with the next multi-part etch.

FIG. 10 illustrates an amount of signal drift for the H-signal as an indication of a completed operation. As illustrated, a removal operation of a first material, such as a silicon-containing material, for example, may be performed, and an emission signal maybe observed from position 1010. After the first material has been removed, such as if disposed over a second material, the etchant signal may adjust at position 1020 as the second material is exposed to the etchant, and is observed through position 1030. This may be utilized as an indication of the process being completed, and may provide an additional mechanism for ending the process by extinguishing a plasma, or by halting the flow of one or more etchant materials.

In this and other multi-part etch scenarios, the first etch process and the second etch process may be performed for different amounts of time, different precursor flow rates, and/or different etch conditions. This may produce outcomes where different amounts of residual hydrogen may be present within the chamber. Accordingly, the chamber clean performed in between etches for a single substrate, and the chamber clean performed between substrates, may be performed for different amounts of time, but may be performed to an end point of a similar residual hydrogen concentration. By performing these dynamic cleaning operations, along with the precise etching processes of the present technology, consistent processes and calculations may be performed, which may afford increased uniformity process to process and substrate to substrate.

In the preceding description, for the purposes of explanation, numerous details have been set forth in order to provide an understanding of various embodiments of the present technology. It will be apparent to one skilled in the art, however, that certain embodiments may be practiced without some of these details, or with additional details.

Having disclosed several embodiments, it will be recognized by those of skill in the art that various modifications, alternative constructions, and equivalents may be used without departing from the spirit of the embodiments. Additionally, a number of well-known processes and elements have not been described in order to avoid unnecessarily obscuring the present technology. Accordingly, the above description should not be taken as limiting the scope of the technology. Additionally, methods or processes may be described as sequential or in steps, but it is to be understood that the operations may be performed concurrently, or in different orders than listed.

Where a range of values is provided, it is understood that each intervening value, to the smallest fraction of the unit of the lower limit, unless the context clearly dictates otherwise, between the upper and lower limits of that range is also specifically disclosed. Any narrower range between any stated values or unstated intervening values in a stated range and any other stated or intervening value in that stated range is encompassed. The upper and lower limits of those smaller ranges may independently be included or excluded in the range, and each range where either, neither, or both limits are included in the smaller ranges is also encompassed within the technology, subject to any specifically excluded limit in the stated range. Where the stated range includes one or both of the limits, ranges excluding either or both of those included limits are also included.

As used herein and in the appended claims, the singular forms “a”, “an”, and “the” include plural references unless the context clearly dictates otherwise. Thus, for example, reference to “a precursor” includes a plurality of such precursors, and reference to “the layer” includes reference to one or more layers and equivalents thereof known to those skilled in the art, and so forth.

Also, the words “comprise(s)”, “comprising”, “contain(s)”, “containing”, “include(s)”, and “including”, when used in this specification and in the following claims, are intended to specify the presence of stated features, integers, components, or operations, but they do not preclude the presence or addition of one or more other features, integers, components, operations, acts, or groups. 

1. An etching method comprising: flowing a hydrogen-containing precursor into a semiconductor processing chamber; flowing a fluorine-containing precursor into a remote plasma region of the semiconductor processing chamber; forming a plasma of the fluorine-containing precursor in the remote plasma region; etching a pre-determined amount of a silicon-containing material from a substrate in a processing region of the semiconductor processing chamber; measuring a radical density within the remote plasma region during the etching; and halting the flow of the hydrogen-containing precursor into the semiconductor processing chamber when the radical density measured over time correlates to a produced amount of etchant to remove the pre-determined amount of the silicon-containing material.
 2. The etching method of claim 1, wherein the measuring is of an atomic trace of hydrogen within the remote plasma region of the semiconductor processing chamber.
 3. The etching method of claim 2, wherein the hydrogen-containing precursor comprises hydrogen, ammonia, or water.
 4. The etching method of claim 2, wherein the measuring is performed with an optical emission spectrometer positioned within a dielectric component at least partially defining the remote plasma region of the semiconductor processing chamber.
 5. The etching method of claim 4, wherein the measuring comprises measuring a peak intensity of radical hydrogen within the remote plasma region of the semiconductor processing chamber.
 6. The etching method of claim 2, further comprising, prior to halting the flow of the hydrogen-containing precursor, identifying an increase in the atomic trace within the remote plasma region.
 7. The etching method of claim 6, wherein the increase correlates to complete removal of the silicon-containing material.
 8. The etching method of claim 1, wherein the remote plasma region is a region defined within the semiconductor processing chamber and separated from the processing region by one or more chamber components.
 9. The etching method of claim 1, further comprising flowing an inert precursor into the remote plasma region and forming a plasma of the inert precursor within the remote plasma region.
 10. The etching method claim 9, wherein a stable plasma of the inert precursor is produced prior to flowing the fluorine-containing precursor into the remote plasma region.
 11. The etching method of claim 1, wherein the hydrogen-containing precursor is flowed to bypass the remote plasma region during the etching method.
 12. A chamber cleaning method comprising: forming a plasma of a fluorine-containing precursor in a semiconductor processing chamber in which an etch process utilizing a hydrogen-containing precursor has been performed; measuring a radical density of the hydrogen-containing precursor; and extinguishing the plasma of the fluorine-containing precursor when the radical density of the hydrogen-containing precursor reaches a pre-determined threshold.
 13. The chamber cleaning method of claim 12, wherein additional hydrogen-containing precursor is not flowed into the semiconductor processing chamber during the chamber cleaning method.
 14. The chamber cleaning method of claim 12, wherein the hydrogen-containing precursor comprises hydrogen, ammonia, or anhydrous hydrogen fluoride.
 15. The chamber cleaning method of claim 12, wherein the measuring is of an atomic trace of hydrogen within a remote plasma region of the semiconductor processing chamber.
 16. The chamber cleaning method of claim 12, further comprising subsequently repeating the etch process utilizing the hydrogen-containing precursor.
 17. The chamber cleaning method of claim 12, wherein the etch process as repeated produces a resultant etch within 5% of the etch process initially performed.
 18. An etching method comprising: flowing a hydrogen-containing precursor into a semiconductor processing chamber; flowing a fluorine-containing precursor into a remote plasma region of the semiconductor processing chamber; forming a plasma of the fluorine-containing precursor in the remote plasma region; etching in a first etch process a pre-determined amount of a silicon-containing material from a substrate in a processing region of the semiconductor processing chamber; measuring a radical density within the remote plasma region during the etching; halting the flow of the hydrogen-containing precursor into the semiconductor processing chamber when the radical density measured over time correlates to a produced amount of etchant to remove the pre-determined amount of the silicon-containing material; removing the substrate from the semiconductor processing chamber; forming a plasma of a fluorine-containing precursor in the semiconductor processing chamber; measuring a radical density of the hydrogen-containing precursor; extinguishing the plasma of the fluorine-containing precursor when the radical density of the hydrogen-containing precursor reaches a pre-determined threshold; and performing a second etch process.
 19. The etching method of claim 18, wherein the first etch process and the second etch process are different etch processes.
 20. The etching method of claim 18, wherein the first etch process comprises a first etch for a dual damascene etch process, and wherein the second etch process comprises a second etch for a dual damascene etch process. 